| 摘要 |
<p>PURPOSE:To efficiently clean a vacuum deposition tank for vapordepositing a magnetic material to be used as a magnetic recording medium, to increase the product yield and to recycle the magnetic material by using this device. CONSTITUTION:A magnetic material 6 is vapor-deposited on a substrate 3 in a vacuum deposition tank 1. In this case, the remainder of the atom vaporized from the magnetic material 6 deposited undesirably on the members 9 and 10 constituting the tank 1 is cleaned off as follows. Namely, the members 9 and 10 are detached after the vapor deposition on the substrate 3 is finished, transported to a cleaning position, cleaned at the cleaning position by a cleaning robot 21 with the cleaning direction, water pressure, etc., freely controllable and allowed to stand in the standby position in preparation for the succeeding vapor deposition, and the cleaning water is introduced into a tank and recycled.</p> |
