Single crystal ferroelectric barium titanate films

摘要

A ferroelectric thin film consisting of a single crystal of BaTiO3 which has a perovskite structure is produced by a method comprising evaporating Ba and Ti in an atomic ratio of 1:1 from discrete evaporation sources of Ba and Ti to deposit them on a substrate in a vacuum deposition vessel while supplying a small amount of an oxygen gas to the reactor.