发明名称 Lighting device
摘要 A lighting device capable of lighting a surface of an observed section of a specimen sample so as to permit an object of observation of the surface to be satisfied even when the surface has relatively fine unevenness. Any one of light field illumination mainly using vertically projected light, dark field illumination mainly using laterally projected light and a combination thereof is selectively carried out with respect to the surface of the specimen sample as desired, to thereby selectively provide a lighted two-dimensional image of the surface and its lighted three-dimensional image as desired.
申请公布号 US5351169(A) 申请公布日期 1994.09.27
申请号 US19930051618 申请日期 1993.04.23
申请人 MITSUBISHI KASEI CORPORATION 发明人 ISHIKAWA, SEIJI;MURAKAMI, HAJIME
分类号 G02B21/06;G02B21/08;G02B21/12;G02B21/36;(IPC1-7):G02B21/06 主分类号 G02B21/06
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