Electrode structure for capacitance-type measurement transducers

摘要

A capacitance-type measuring apparatus includes first and second support members which are movable with respect to one another along a measurement axis; a first electrode array and a second electrode disposed on the first support member; and a third electrode array disposed on the second support member and capacitively coupling the first electrode array and second electrode for transmission of a signal between the first electrode array and second electrode through the third electrode array. One of the first electrode array or the second electrode is formed to have end portions configured such that the degree of coupling between the first electrode array and second electrode through the third electrode array decreases linearly along the extent of each end portion relative to the measurement axis. This configuration permits improved measurement accuracies by reducing the effects of tilt between the first and second support members which changes the spacing between such members along the axis of measurement.