| 摘要 |
PURPOSE:To reduce the production cost of gaseous argon by recovering the evaporation loss caused by the infiltration of heat into an argon tank from the external air. CONSTITUTION:Liq. argon produced in argon producing devices 1a and 1b is stored in an argon tank 7, and a gaseous argon recovery pipeline 13 is branched from a relief valve 12 provided to the tank 7. The evaporated argon is recovered by the pipeline 13, and the pressure of the gaseous argon recovered in the pipeline 13 is adjusted by a pressure controller 16. A flow controller 22 is furnished on the downstream side of the pressure controller 16 to adjust the flow rate of gaseous argon flowing in a return pipeline 21, gaseous argon is returned to the argon producing devices 1a and 1b through the return pipeline 21, and the gaseous argon is again fractionated.
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