| 摘要 |
<p>PURPOSE: To temporarily store wafers by placing two wafer supports which support both ends of a wafer loaded into a cassette, disposing the supports in positions relative to two axes, and loading and unloading the wafers by means of two carrying blades. CONSTITUTION: A cassette 10 is comprised principally of two wafer supports 13, 15, a top plate 17 including an optionally attachable carrying handle 19, and a bottom plate 21. A plurality of integrally formed wafer support shelves 23, projection mounting shoulders 25 and downwardly extending mounting feet 27 are disposed on the wafer supports 13, 15. A series of integrally formed steps 29a-29c for positioning and retaining individual wafers 31 thereon are disposed on each wafer support shelf 23. The shelf lengths and positions of the wafer supports 13, 15 depend upon the diameter of the wafer 31 to be loaded onto the wafer support shelves 23, the widths of wafer-carrying blades, and the intersection angles of the axes of extension travel paths.</p> |
