发明名称 |
Apparatus for use with analytical measuring instruments using electromagnetic radiation analysis methods |
摘要 |
A method and apparatus for use in performing non-contact analytical evaluation of a semiconductor wafer, which needs to be kept clean, to be performed outside of clean room facilities. The apparatus maintains a clean environment surrounding the semiconductor wafer and a portion of the apparatus is substantially transparent to a probe beam of electromagnetic radiation such as X-rays and visible light. The invention substantially overcomes the expenses associated with locating analytical test equipment for testing semi-conductor wafers within clean room facilities.
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申请公布号 |
US5350923(A) |
申请公布日期 |
1994.09.27 |
申请号 |
US19920996411 |
申请日期 |
1992.12.23 |
申请人 |
NORTHERN TELECOM LIMITED |
发明人 |
BASSIGNANA, ISABELLA C.;KOVATS, TIBOR F. I. |
分类号 |
G01N23/20;(IPC1-7):H01J37/20 |
主分类号 |
G01N23/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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