| 摘要 |
PURPOSE:To secure an optimum contrast easily even in the case of a complex inspected work by calculating the extent of perpendicular transmitted damping in the inspected work, and determining an optimum inspecting condition after searching the contrast (damping degree) so as to become as large (small) value as possible. CONSTITUTION:An input part 1 inputs structure, composition or the like of an inspected work, for example, thickness of each layer and layer numbers through an input unit 2. A contrast operational part 3 calculates a wavelength pair contrast characteristic of the inspected work on the basis of mass absorption coefficient, density, thickness inherent in a composition of each layer from data out of the input part 1. In addition, a transmitted intensity operational part 7 operates the extent of transmitted intensity in the inspected work, and from the contrast and X-ray transmitted intensity calculated (3, 7), a condition searching part 8 searches that the contrast is large but the damping degree is small as far as possible, thereby determining the optimum inspection condition. X-rays controlled on the basis of this optimum inspection condition is generated (12), irradiating it to the inspected work 13, and it is picked up (14) by a camera. With this constitution, an optimum contrast is easily securable even to such an inspected work as having complex form and composition. |
