发明名称 |
PHOTOSENSITIVE SELF-ADHESIVE RESIST COMPOSITION |
摘要 |
PURPOSE:To provide a photosensitive self-adhesive resist compsn. capable of forming a high resolution resist pattern excellent in etching resistance by a general exposure system without using a stepper and enabling easy production of a circuit element board having a large area with high productivity as a photoresist material capable of coating in a thin single layer and having function to transfer and fix a metallic mask, etc., on the surface. CONSTITUTION:This photosensitive self-adhesive resist compsn. having surface adhesiveness of a coating film sufficient to fix a mask pattern and forming a non-image part which can be removed by development and a nonsticky hardened image part by irradiation with an active light is made of a polymerizable acrylic oligomer contg. a compd. represented by the formula (where X is a residue of polyol and (n) is an integer of 2-6). |
申请公布号 |
JPH06266103(A) |
申请公布日期 |
1994.09.22 |
申请号 |
JP19930050621 |
申请日期 |
1993.03.11 |
申请人 |
DAINIPPON INK & CHEM INC |
发明人 |
SAKAGUCHI NORIHISA;MURAKAMI KAZUO;YAMAGUCHI HISAO |
分类号 |
G03F7/027;G03F7/028;G03F7/038;H01L21/027;(IPC1-7):G03F7/038 |
主分类号 |
G03F7/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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