| 摘要 |
<p>PURPOSE:To measure the extent of acid content in a mixed acid to be used as processing chemicals in a manufacturing process of a semiconductor and a liquid crystal display or the like, continuously of its composite portion at the same time in an accurate manner. CONSTITUTION:A measuring objective mixed acid is inducted into a light transmission detecting flow cell 11, absorbance of each wavelength is operated respectively from a transmitted light intensity signal of the mixed acid of a light receiving element 12 converted into a digital signal at an analog-to-digital converter 52 by 8 microprocessor 54 of a data processor 53, while on the basis of the absorbance of each wavelength operated and an analytical curve formula prerequested by a multivariate analysis method, the cextent of acis content in the mixed acid is operated in this way.</p> |
