SUBSTRATE HAVING BLACK MATRIX AND ITS PRODUCTION AND LIQUID CRYSTAL DISPLAY DEVICE

摘要

PURPOSE:To provide the substrate having a black matrix consisting of a black light shielding film having a high light shielding rate, low surface reflectivity and small film thickness by providing the substrate with the black matrix consisting of the black light shielding film having a specified optical density and film thickness. CONSTITUTION:This substrate has the black matrix BM consisting of the black light shielding film having >=2.0 optical density to light of a visible region and <=1.0mum film thickness. Namely, a transparent negative type photoresist is applied on the transparent glass substrate SUB2 to form a transparent negative type photoresist film PR which is then exposed by irradiating the film with light L. The negative type photoresist film PR is then developed by using a prescribed developer to form prescribed patterns. The black light shielding film BM is formed over the entire surface of the transparent glass substrate SUB2. The transparent negative type photoresist film PR is then immersed into an etching liquid which penetrates the black light shielding film BM' and swells and dissolves the transparent negative type photoresist film PR and is thereby peeled and removed together with the black light shielding film BM' thereon, by which the black matrix BM is formed.