| 摘要 |
PURPOSE:To provide such a secondary electron spectroscope as capable of selectively observating a specific material alone in plural pieces of matter by means of changing an ultraviolet wavelength to be radiated together with X-rays at the time of observing a certain element in a sample in which plural materials including the same element exist. CONSTITUTION:A laser beam out of a YAG laser light source 1 is branched off by a half mirror 30, converting it into a triple higher harmonic wave over an ultraviolet wave length area with a nonlinear crystal 32, and an ultraviolet wavelength is regulated by optical parametric generator 33 according to observation object material, thereby changing an optical path with a mirror 34. Next, it is further converted into a higher harmonic wave by a harmonic generator 35, condensing it on a sample with a condenser lens 36, and intensity in an ultraviolet wave is regulated by a wedge 37, while an ultraviolet optical path, which radiates ultraviolet rays as an exciting radiant light to the sample 11 via an ultraviolet-ray transmitting window 38 installed in a vacuum sample chamber 8, is constituted there, and ultraviolet rays are irradiated to the sample 11 together with X-rays. |
