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经营范围
发明名称
Verfahren und Vorrichtung zur Analyse einer Oberfläche.
摘要
申请公布号
DE68916168(T2)
申请公布日期
1994.09.22
申请号
DE19896016168T
申请日期
1989.10.24
申请人
HITACHI, LTD., TOKIO/TOKYO, JP
发明人
NINOMIYA, KEN HITACHI KOYASUDAI APARTMENT B10, HACHIOJI-SHI, JP;NISHIMATSU, SHIGERU, KOKUBUNJI-SHI, JP
分类号
G01N21/00;G01N23/00;G01N23/227;(IPC1-7):G01N23/227
主分类号
G01N21/00
代理机构
代理人
主权项
地址
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