申请人 |
HITACHI CHEMICAL CO., LTD., TOKIO/TOKYO, JP;HITACHI, LTD., TOKIO/TOKYO, JP |
发明人 |
TAI, SEIJI, PALO ALTO CALIFORNIA 94306, US;HAYASHI, NOBUYUKI, HITACHI-SHI, JP;KAMIJIMA, KOICHI, HITACHI-SHI, JP;KATAYOSE, MITSUO, HITACHI-SHI, JP;AKIMOTO, TAKAYUKI, HITACHI-SHI, JP;HAYASHIDA, SHIGERU, HITACHI-SHI, JP;HAGIWARA, HIDEO, HITACHI-SHI, JP;ERA, SUSUMU, ICHIHARA-SHI, JP;KOBAYASHI, SETSUO, HITACHI-SHI, JP;MUKOH, AKIO, MITO-SHI, JP |