| 摘要 |
Process and apparatus for treating uncoated films (4) or strips of plastic in a vacuum treatment chamber (1), having at least one roll (3) for guiding the film (4) and at least one glow-discharge cathode (7), a low-pressure plasma (11) being produced in a reaction zone (5) between film (4, 25) and cathode (7) and either argon, chlorine, fluorine or oxygen, or a mixture of argon and oxygen, being admitted as a process gas, the proportion of the oxygen in the mixture lying in the range from 1 to 5 per cent by volume and the films (4) or strips being movable through the reaction zone (5) and passed on for subsequent further processing. <IMAGE>
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| 申请人 |
LEYBOLD AG, 63450 HANAU, DE |
发明人 |
FISCHER, GREGOR, DIPL.-ING., 61169 FRIEDBERG, DE;GRIMM, HELMUT, DR.-PHYS., 64291 DARMSTADT, DE;LOEBIG, GERHARD, DIPL.-ING., 60489 FRANKFURT, DE;ROS, NORBERT, 63477 MAINTAL, DE;STEINIGER, GERHARD, DIPL.-PHYS., 63549 RONNEBURG, DE |
