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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06268057(A)
申请公布日期
1994.09.22
申请号
JP19930050955
申请日期
1993.03.11
申请人
TOSHIBA CORP
发明人
CHIKAMATSU NAOHITO
分类号
H01L21/265;H01L21/76;H01L21/762;H01L29/10;(IPC1-7):H01L21/76
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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