| 摘要 |
PURPOSE: To manufacture a simpler fine structure object of high reliability which does not have a permanent pillar, by using a sacrificial layer which can cover the surfaces of various kinds of structural layers, and using a temporary pillar retaining the structurial layer in the course of wet-etching. CONSTITUTION: A sacrificial layer 12 is arranged on a substrate 10, and a structural layer 14 is spread on the sacrificial layer 12 and fixed. Holes 16 are formed on the structural layer 14, and some of the holes 16 are covered with a polymer layer 18. The sacrificial layer 12 is etched through the holes 16 which are not covered, and a void region 19 is stretched as far as the substrate 10. The void region 19 is filled with the protective polymer layer 18, and a temporary pillar 24 between the substrate 10 and the structural layer 14 is formed. This temporary pillar 24 prevents the structural layer 14 from being pulled toward the substrate 10 side by the effect of capillary force when etching liquid and cleaning liquid are evapolated. As a result, deformation of the structural layer 14 and eternal pinning which is undesirable for the structural layer 14 can be prevented, and a simpler fine structure object of high reliability which does not have a permanent pillar can be manufactured. |
