MANUFACTURE OF SILICON SUBSTRATE AND CRYSTALLINE SILICON SOLAR CELL

摘要

PURPOSE:To provide a crystalline silicon solar cell at a low cost by a method wherein a silicon substrate thinner than a conventional one can be manufactured or a substrate cheaper than a conventional one can be employed. CONSTITUTION:A silicon fine particle deposit layer 16 formed on a support board 1 is heated with plasma 12 of high temperature and a halogen lamp 13 and crystallized, and the crystallized deposit layer 16 is separated off from the support, board 1 and formed into a crystalline silicon substrate 18 of thickness 10mum.