PRESSURE CONTROLLER FOR VACUUM CHAMBER,申请号JP19930081338-传众专利搜索

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发明名称	PRESSURE CONTROLLER FOR VACUUM CHAMBER
摘要
申请公布号	JPH06266446(A)	申请公布日期	1994.09.22
申请号	JP19930081338	申请日期	1993.03.16
申请人	KOKUSAI ELECTRIC CO LTD	发明人	SATO TAKEO
分类号	G05D16/20;(IPC1-7):G05D16/20	主分类号	G05D16/20
代理机构		代理人
主权项
地址

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