Vacuum pump with magnetic bearing.

摘要

A vacuum pump has a pump housing, magnetic bearings mounted in the housing, a rotary assembly including a pump rotor disposed in the housing and supported for rotation by the magnetic bearings and two spaced emergency bearings supporting the pump rotor when it deviates by a predetermined extent from a desired position. The rotary assembly has a center of gravity which is situated between the emergency bearings and which is spaced approximately equally therefrom.