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发明名称
Semiconductor processing apparatus and method.
摘要
申请公布号
EP0398366(B1)
申请公布日期
1994.09.21
申请号
EP19900109478
申请日期
1990.05.18
申请人
APPLIED MATERIALS, INC.
发明人
SEVERNS, DAVID W.;TOMPSON, BRIAN;LINDSTROM, PAUL R.;CARLSON, DAVID K.
分类号
H01L21/205;C23C16/54;C30B25/02;C30B35/00;H01L21/673;H01L21/687;(IPC1-7):C23C16/44;H01L21/00
主分类号
H01L21/205
代理机构
代理人
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地址
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