发明名称 Manufacture of printhead with diamond resistors
摘要 An thermal ink jet printhead is fabricated with resistors of doped diamond. A diamond substrate is masked in the pattern of the resistors and bombarded with boron ions with high energy to embed the boron with only a negligible amount on the surface. If a protective layer is applied, the same mask is used. The process is simple and low cost, and the resulting substrate is hard, insulating, and chemically inert.
申请公布号 US5348909(A) 申请公布日期 1994.09.20
申请号 US19930038205 申请日期 1993.03.26
申请人 LEXMARK INTERNATIONAL, INC. 发明人 STASIAK, JAMES W.
分类号 C23C14/04;C23C14/48;H01L21/02;H01L21/3205;(IPC1-7):H01L21/70 主分类号 C23C14/04
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