REACTIVE SPUTTERING DEVICE,申请号JP19930076172-传众专利搜索

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发明名称	REACTIVE SPUTTERING DEVICE
摘要
申请公布号	JPH06264239(A)	申请公布日期	1994.09.20
申请号	JP19930076172	申请日期	1993.03.10
申请人	ANELVA CORP	发明人	KOBAYASHI MASAHIKO
分类号	C23C14/34;C23C14/54;(IPC1-7):C23C14/54	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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