发明名称 OUTER SHAPE INSPECTION DEVICE
摘要 PURPOSE:To inspect both the profile and rear surface of an object to be inspected with one camera by providing a profile image reflection member with a mirror surface part for reflecting the image of the profile of the object to be inspected (lead wire of IC, etc.). CONSTITUTION:A profile image reflection member 9 consists of a mirror surface part 8 consisting of a prism and a mirror surface part retention member 8a for retaining it at both sides, thus forming the stand for an IC 4. The IC 4 is placed on the member 9 and a camera 10 is placed at a specific position. The camera image picked up and output by the camera 10 consists of the image obtained by reflecting the image of the profile of the inside of a lead 4a of the IC4 on the mirror surface part 8 (a flatness inspection image 11 of the lead 4a) and the image of the rear surface of the lead 4a (a side-bending inspection image 12), thus capturing both images of the inspection images 11 and 12 into the visual field of one camera 10. The mirror surface part 8 may be formed by performing plating treatment to a metal member and then finishing it to a mirror-surface state and the member 9 may be formed by providing a light source inside the member made of a transparent resin such as acryl.
申请公布号 JPH06265323(A) 申请公布日期 1994.09.20
申请号 JP19930054476 申请日期 1993.03.16
申请人 HITACHI LTD;HITACHI HOKKAI SEMICONDUCTOR LTD 发明人 HAMACHI HISAFUMI
分类号 G01B11/24;G01B11/245;G01N21/88;G06T1/00;H01L21/66 主分类号 G01B11/24
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