发明名称 Thorium-free coating for germanium IR window
摘要 Durable thorium fluoride, low reflectance, high transmittance coatings for germanium (zinc sulfide, zinc selenide, gallium arsenide) exterior window surfaces are replaced using magnesium fluoride, a material previously not considered applicable to the 8 to 12 mu m wavelength range. This is enabled by the use of argon ion bombardment of the growing film. This method reduces the intrinsic stress of deposited films and permits growth of magnesium fluoride films of sufficient thickness to be used on the exterior surface of IR windows.
申请公布号 US5349467(A) 申请公布日期 1994.09.20
申请号 US19920966920 申请日期 1992.10.27
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 SULZBACH, FRANK C.;EPLING, VALERIA J.
分类号 C23C14/02;C23C14/06;G02B1/11;G02B5/28;(IPC1-7):G02B5/28;G02B1/10;G02B1/12 主分类号 C23C14/02
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