| 摘要 |
PURPOSE:To achieve an external shape measuring device which can easily recognize whether or not an object to be measured is properly laid out near a scanning surface by scanning optical beams and detecting a period when the optical beams are intercepted. CONSTITUTION:The device is provided with an optical beam scanning means 1 for scanning optical beams 10 focused on a scanning surface A, a focusing means 2 for focusing the optical beams 10, a light reception means 3 for receiving the optical beams 10 and then outputting an electrical signal, and a processing means 4 for deriving an interception period from the electrical signal and then calculating the width for the optical beams 10 of an object 100 to be measured. It is configured so that it is provided with a change rate detection means 5 for detecting the change rate of the electrical signal. |
