DEVICE AND METHOD FOR CONTINUOUS FORMATION OF FUNCTIONAL DEPOSITED FILM,申请号JP19930042885-传众专利搜索

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发明名称	DEVICE AND METHOD FOR CONTINUOUS FORMATION OF FUNCTIONAL DEPOSITED FILM
摘要
申请公布号	JPH06260419(A)	申请公布日期	1994.09.16
申请号	JP19930042885	申请日期	1993.03.03
申请人	CANON INC	发明人	FUJIOKA YASUSHI
分类号	H01L21/205;(IPC1-7):H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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