| 摘要 |
PURPOSE:To improve sensitivity of a vibration gyro by forming in hardness a bent part of a support member for supporting a vibration element lower then the other part, and alleviating a reaction force generated in the member at the bent part to obtain an efficient free vibration of a vibrator. CONSTITUTION:A drive signal is applied to a driving piezoelectric element 3 to vibrate to bend a vibration element 2 in a direction perpendicular to a surface free of a piezoelectric element 3, and a voltage is generated in the element in response to the vibration. In this case, support members 6, 7 are bent at horizontal parts 6b, 7b and vertical parts 6c, 7c by bending vibration of the element 2, and a reaction is so generated at the members 6, 7 as to be returned to an original shape state. However, since the parts 6a, 7a are smaller in hardness than the other parts 6b, 6c, 7b, 7c, reaction forces generated at the members 6, 7 due to twisting of the parts 6a, 6b are alleviated to obtain an efficient free vibration of a vibrator 1. Accordingly, sensitivity of a vibration gyro is improved. |
