DIRECT IMAGE FORMATION OF THREE-DIMENSIONAL CIRCUIT AND SAME THING

摘要

PURPOSE: To obtain an improve method for manufacturing a practically non- plane base layer which has many elements forming a previously determined pattern and to which profile shapes are double imparted, by etching and eliminating an undesired part from a metallized layer exposed in the course of development by using acid or other proper techniques. CONSTITUTION: A light source of coherent light wherein an excimer laser 80 is contained is used for forming many elements 9 having a previously determined pattern on the surface of a base layer 20 containing a metallized layer 25, base layer of which is covered with a bottom part layer 24 and a photo-setting cover 26. The first element 9 of the above pattern is formed by directly forming an image of the first element 9 on the photo-setting cover 26. The base layer 20 is relatively moved to the light source of coherent light until all the elements 9 of the pattern are formed in the photo-setting cover 26 on the whole surface of the base layer 20, and the pattern is completed. A part of the metallized layer 25 on which the photo-setting cover 26 is etched is eliminated from the base layer 20.