| 摘要 |
PURPOSE:To provide a multi-dimensional acceleration detector wherein it is based on a new system which is completely different from a piezoresistance system in conventional cases by a method wherein an acceleration component in the direction of one axis is detected without being influenced by accceleration components in directions of other axes. CONSTITUTION:An action part 4 which is arranged so as to be movable by the action of a force caused by an applied acceleration and which is made of a conductor and two pairs of electrodes 6a, 6b, 7a, 7b which are arrange so as to face the action part 4 on at least two axes X, Y which are at right angles around the action part 4 are provided. |
