| 摘要 |
<p>PURPOSE:To provide a long-lived plate heater, which is capable of transmitting infrared rays from heating wire materials, prevents surrounding gas from infiltrating into the heating wire material parts, prevents impurities from the heating wire materials from being scattered and moreover, is inhibited from deforming and can be utilized for heating a material to be treated needless to say a semiconductor manufacturing device and also in the others, and an easy and reliable method of manufacturing the plate heater. CONSTITUTION:A plate heater A is manufactured into a structure, wherein heating wire materials 3 arranged in a plane manner are inserted between quartz plates 1 and 2, the whole peripheries of the peripheral edge parts 11 and 23 of these quartz plates are welded together and the heating wire materials are sealed.</p> |
