| 摘要 |
PURPOSE:To prevent a lighting area from spreading out of the area to be inspected on a subject and to prevent dispersion in defect detection sensitivity from generation following dispersion of the illumination intensity distribution. CONSTITUTION:A light beam L1 from a light source 1 is magnified in the X- direction by lens systems 6A, 7A to irradiate a light shielding plate 16, in which an opening 19 is formed, and a light beam L8 passing through the opening 19 irradiates a slit-shaped lighting area 20 extending in the X-direction on a reticule 1. The reticule 1 is moved by using a driving device 3 in the Y-direction to the lighting area 20, while the X-directional edges 19a, 19b of the opening 19 in the light shielding plate 16 are set to be parallel to the direction crossing the Y-direction respectively. |
