| 摘要 |
PURPOSE:To provide an optical waveguide having high dimensional accuracy and a low loss and to provide its production method. CONSTITUTION:This optical waveguide consists of a substrate 10, clad layer 11 formed on the substrate 10, and a core 12 having almost a rectangular cross section formed in the clad layer 11. The clad 11 and the core 12 consist of SiOxNyHz. The nitrogen content in the clad layer 11 is specified to 0.2-2 atomic %, while the nitrogen content in the core 12 is specified to 3-25 atomic %. |
