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经营范围
发明名称
PRETREATMENT FOR FILM FORMATION
摘要
申请公布号
JPH06260418(A)
申请公布日期
1994.09.16
申请号
JP19930042593
申请日期
1993.03.03
申请人
OKI ELECTRIC IND CO LTD
发明人
KAKINUMA HIROAKI;MORI MIKIO
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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