| 摘要 |
<p>PURPOSE:To prevent the infiltration of moisture from the outside through an interlayer insulating film into a liquid crystal layer by forming the interlayer insulating film only on the pixel display part and a driving circuit. CONSTITUTION:A TFT 102 for pixel switching and a TFT (driver) 103 for driving the pixel electrode are simultaneously formed on an insulating substrate 101. Polyimide is then applied as the interlayer insulating film 104 thereon and is patterned by a dry etching method. The parts to be etched in the interlayer insulating film 104 are confined to the part of the pixel TFT 102 to be connected to the pixel electrode, the part 109 (sealing part) to be connected to a counter substrate, the part to be conducted to the counter substrate 107 and an external electrode connecting part at this time. The pixel electrode 106 is formed out to ITO on the pixel TFT 102 after the end of etching. An ITO film is also formed on the driver 103 at the same time and is used as an electromagnetic shield 112. The interlayer insulating film 104 does not exist in the sealing part according to this constitution and, therefore, the infiltration of the moisture from the outside through the interlayer insulating film 104 into the liquid crystal layer is lessened.</p> |
