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发明名称
PLASMA CVD DEVICE
摘要
申请公布号
JPH06260435(A)
申请公布日期
1994.09.16
申请号
JP19930072906
申请日期
1993.03.08
申请人
KOKUSAI ELECTRIC CO LTD
发明人
TAKAHASHI KIYOSHI;MURAMATSU FUMIO;TAKEDA TOMOHIKO
分类号
C23C16/50;C23C16/52;H01L21/205;H01L21/31;(IPC1-7):H01L21/205
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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