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发明名称
GROWTH OF SEMICONDUCTOR CRYSTAL AND MANUFACTURE OF MOS TRANSISTOR
摘要
申请公布号
JPH06260416(A)
申请公布日期
1994.09.16
申请号
JP19930070709
申请日期
1993.03.08
申请人
SONY CORP
发明人
TSUKAMOTO HIRONORI
分类号
H01L21/20;H01L21/205;H01L21/265;H01L21/336;H01L29/78;H01L29/786;(IPC1-7):H01L21/20;H01L29/784
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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