Device for transferring wafer magazines

摘要

In the case of a device for transferring wafer magazines, the aim is, even for a solution in which a manipulation device has to operate over two regions which can be separated from one another or optionally combined, as far as possible to exclude the possibility of the manipulation causing particle generation and the manipulation device causing interference with the laminar flow from the clean room. According to the invention, for the purpose of moving the magazine from a standby position to a workplace there is fastened on a supporting column, the gap between which and a lift drive constitutes an air throughflow opening, a linear drive which can be adjusted vertically in the direction of movement of the lift and is intended for a rigid gripper arm, the region of action of which is above the magazine, when the latter is in the standby position, and which gripper arm is directed perpendicularly to the direction of movement of the lift. All drive parts are separated from the clean room by a dust-tight encapsulation and suction devices adjoin openings through which transfer elements project into the clean room. The invention makes it possible to equip or upgrade semiconductor fabrication systems with an SMIF system.