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经营范围
发明名称
Circuit for determining the presence of a plasma.
摘要
申请公布号
EP0347717(B1)
申请公布日期
1994.09.14
申请号
EP19890110662
申请日期
1989.06.13
申请人
LEYBOLD AKTIENGESELLSCHAFT
发明人
GESCHE, ROLAND, DR.;VEY, NORBERT
分类号
G01R23/00;H01J37/32;H05H1/00;(IPC1-7):H05H1/00
主分类号
G01R23/00
代理机构
代理人
主权项
地址
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