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发明名称
Electrostatic clamp and method.
摘要
申请公布号
EP0439000(B1)
申请公布日期
1994.09.14
申请号
EP19910100003
申请日期
1991.01.02
申请人
APPLIED MATERIALS INC.
发明人
SAVAS, STEPHEN E.
分类号
B23Q3/15;H01L21/31;H01L21/683;H02N13/00;(IPC1-7):H02N13/00;H01L21/00
主分类号
B23Q3/15
代理机构
代理人
主权项
地址
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