| 摘要 |
A method and equipment for fabricating two diffraction gratings having the same period but phases that are shifted by lambda /4 on a work to be treated. A laser beam is divided into two light beams and one of the beams is delayed over a portion of the light beam. The divided light beams are then mixed together so that they interfere. Using the known photolithography technology, the interference patterns are formed into diffraction gratings. |
