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发明名称
HANDOTAISHUSEKIKAIROYORYONOSEISAKUHOHO
摘要
申请公布号
JPH0673367(B2)
申请公布日期
1994.09.14
申请号
JP19830502043
申请日期
1983.05.09
申请人
发明人
分类号
H01L27/04;H01L21/02;H01L21/20;H01L21/822;H01L21/8234;H01L27/08;H01L27/088;H01L29/78;(IPC1-7):H01L27/04
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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