| 发明名称 |
Light-sensitive compositions. |
| 摘要 |
<p>A light-sensitive composition comprising: (a) a polysiloxane compound having at least 1 mol% of a structural unit derived from a product of a thermal cycloaddition reaction between a compound of formula (I), (II), (III) or (IV) and a compound of formula (V), (VI), (VII) or (VIII), and (b) an orthoquinonediazide compound. <CHEM></p> |
| 申请公布号 |
EP0410760(B1) |
申请公布日期 |
1994.09.14 |
| 申请号 |
EP19900308212 |
申请日期 |
1990.07.26 |
| 申请人 |
FUJI PHOTO FILM CO., LTD. |
发明人 |
MIZUTANI, KAZUYOSHI, C/O FUJI PHOTO FILM CO., LTD.;AOAI, TOSHIAKI, C/O FUJI PHOTO FILM CO., LTD. |
| 分类号 |
G03F7/022;C09D11/03;C09D11/10;C09D11/102;G03F7/075;G03F7/20;H01L21/027;H01L21/30;(IPC1-7):G03F7/075 |
主分类号 |
G03F7/022 |
| 代理机构 |
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