| 摘要 |
PURPOSE:To improve the driving stability and utilization efficiency of space, enable direct driving or highly accurate positioning, and improve the energy efficiency by arranging an elastic body coming into contact under pressure with a travel surface and an ultrasonic motor having a vibrator installed in the elastic body in a block member or a rail member. CONSTITUTION:Electric power supply is inputted to an ultrasonic motor 13a arranged in a block member 11 or a rail member 12, and high frequency voltage is impressed upon a piezoelectric element or the like, for example, as a vibrating element. Then, the vibrating element vibrates in a frequency of an ultrasonic wave, and deforms an elastic body 14a, and relatively movable force acts between the block member 11 and the bendable rail member 12, and relative motion can be made between the block member 12 and the rail member by this force. Since the ultrasonic motor 13a can secure acceleration and deceleration large and does not cause electromagnetic noise, a bad influence such as malfunction is not exerted even when it is used in a peripheral equipment such as a computer. |
