Contact probes

摘要

PCT No. PCT/GB92/00330 Sec. 371 Date Oct. 7, 1992 Sec. 102(e) Date Oct. 7, 1992 PCT Filed Feb. 24, 1992 PCT Pub. No. WO92/14987 PCT Pub. Date Sep. 3, 1992.A touch trigger probe includes a hybrid integrated circuit (58). On this circuit are provided both kinematic support elements (28) for supporting a deflectable stylus (14) in a precise rest position, and sensing elements (40) for detecting contact between the stylus (14) and a workpiece. Embodiments are also disclosed in which the kinematic support elements are provided on a silicon chip, e.g. by micro-machining.