WEFER STORAGE METHOD AND THE EQUIPMENT OVER ATMOSPHERIC PRESSURE

摘要

The apparatus improves the reliability of gate oxide by preventing the contamination of carbon and inhibiting the growth of the native oxide on the wafer. The apparatus comprises (A) the first chamber (6) connecting a check valve (4) in the shoe (1) inlet; (B) an in-flow pressure controller (2) operated by a gas pressure monitored by a valve (10) with a spring (11); (C) the second chamber (14) in the opposite direction of the first chamber connecting outlet check valve (20); (D) an out-flow pressure controller (3) with a valve (16) opening and closing a gas pathway (15).