MASKING METHOD OF PLANERIZED ALUMINUM ALLOYED WIRE

摘要

The method distinguishes an align key hole by selectively removing Al alloy on the align key hole. The method comprises (A) forming an isolating layer (2) on a substrate (1); (B) depositing an Al alloy layer (4) and spreading a photoresist (10) on the Al alloy layer; (C) removing the photoresist on the scribe region (8); (D) etching the Al alloy layer by masking the photoresist and restoring the shape of the original align key hole; (E) masking the Al alloy wiring.