发明名称 LASER PATTERN GENERATION APPARATUS
摘要 <p>In a method of raster scanning a photosensitive material using a modulated laser beam, the beam is split into a plurality of independent beams which are independently modulated. As shown, a beam from a laser 10 is passed to a workpiece 34 via a splitter 13, acousto-optic modulator 16, dove prism 17 (to prevent interference), rotating polygon mirror 24, F-thete lens 26 and beam splitter 28 (to provide beams for (a) system control and (b) workpiece location). <IMAGE></p>
申请公布号 KR940008359(B1) 申请公布日期 1994.09.12
申请号 KR19860003730 申请日期 1986.05.13
申请人 ATEQ CORP. 发明人 ALLEN, PAUL C.;WARKENTIN, PAUL A.
分类号 B23K26/06;B23K26/067;B23K26/073;G02B5/08;G02B27/10;G03F1/00;G03F7/20;H01L21/027;H01L21/30;H01S3/101;(IPC1-7):H01L21/30 主分类号 B23K26/06
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