Elektrische Schaltung mit supraleitender Mehrschichtstruktur und Herstellungsverfahren dafür.
摘要
An electric circuit is provided on a semiconductor substrate with a superconducting film. The surfaces in contact with the superconducting film are made of heat-resistant non-oxide insulating materials so that the performance of the superconducting film is not degraded.
申请公布号
DE3889762(T2)
申请公布日期
1994.09.08
申请号
DE19883889762T
申请日期
1988.03.31
申请人
SEMICONDUCTOR ENERGY LABORATORY CO., LTD., ATSUGI, KANAGAWA, JP