摘要 |
A process for chemical vapor-phase synthesis (CVD) of diamond with a wide variety of applications inexpensively at a high speed is disclosed. In one embodiment, a mixture of an oxygen gas, a carbon-containing compound gas, and optionally an inert gas is introduced into a reaction vessel, and a plasma is generated therein utilizing an electromagnetic field to thereby produce diamond on a base material placed in the vessel. In another embodiment, at least one of a fluorine gas, a chlorine gas, a nitrogen oxide gas and a sulfur dioxide gas, a mixture thereof with an oxygen gas and a carbon-containing compound gas, or a mixture thereof with an inert gas is introduced into a reaction vessel, and a plasma is generated therein utilizing an electromagnetic field to thereby produce diamond on a base material placed in the vessel. |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD., OSAKA, JP |
发明人 |
TANABE, K. ITAMI WORKS OF SUMITOMO EL. IND.LTD., HYOGO 664, JP;IMAI, T. ITAMI WORKS OF SUMITOMO EL. IND., IND., ITAMI-SHI HYOGO 664, JP;FUJIMORI, N. ITAMI WORKS OF SUM. EL. IND., LTD., ITAMI-SHI HYOGO 664, JP |